Auflistung nach Schlagwort "Electron beam lithography"

Auflistung nach Schlagwort "Electron beam lithography"

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  • Combined atomic force microscope and electron-beam lithography used for the fabrication of variable-coupling quantum dots 
    Rogge, M.C.; Fühner, C.; Keyser, U.F.; Haug, Rolf J.; Bichler, M.; Abstreiter, G.; Wegscheider, W. (College Park, MD : American Institute of Physics, 2003)
    A study was performed on combined electron-beam lithography and atomic force microscopy used for the fabrication of variable-coupling quantum dots. The conventional electron-beam lithography was combined with direct ...
  • Generation of ultrasmall nanostructures in oxide layers assisted by self-organization 
    Block, T.; Pfnür, Herbert (College Park, MD : American Institute of Physics, 2008)
    We explored the structural limits of unconventional electron-beam lithography by directly writing with an electron beam into ultrathin SiO2 films. The obtained structures were analyzed by tunneling microscopy. The Auger ...
  • Spin blockade in capacitively coupled quantum dots 
    Rogge, M.C.; Fühner, C.; Keyser, U.F.; Haug, Rolf J. (College Park, MD : American Institute of Physics, 2004)
    The spin blockade in capacitively coupled quantum dots was discussed using local anodic oxidation (LAO) and electron beam lithography. The tunability of the interdot coupling as a function of top gate voltage and magnetic ...